反应条件
in gaseous matrix byproducts: HCl; diluting gas mixt. in Pyrex reaction cell (20 Torr), photolysis at 193 nm, CCl4/SiH4/O2=3/10/1 m Torr, total pressure 30 Torr, delay time between photolysis ArF and probe dye lasers 500 μs;
参考文献
Journal of Physical Chemistry, , vol. 100, # 44 p. 17501 - 17506