参考文献
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; AHN, Hee Choon; LEE, Su Hyun; YANG, Soo Jin; SHIN, Hyo Nim; MOON, Doo-hyeon; KIM, Young Gil; LEE, Hyo Jung; CHO, Young Jun; KWON, Hyuck Joo; LEE, Kyung Joo; KIM, Bong Ok
Patent: WO2012/39561 A1, 2012 ;
Location in patent: Page/Page column 29; 30 ;