oxygen in further solvent(s) liquid injection of Ru precursor (ethylcyclohexane); O2 as reactant; Ar as carrier gas; Si(100) as substrate; 230-280°C; X-ray fluorescence spectroscopy; XRD; AES;;
参考文献
Journal of the Electrochemical Society, , vol. 154, # 2 p. D95-D101
