Cl2
byproducts: DCl; flow reactor; pressure of about 2 Torr; mixture of Cl2 in helium was passed through a microwave discharge to form halogen atoms; slight excess of silane-d4 was introduced into the flow stream;
参考文献
Johnson, Russell D.; Tsai, Bilin P.; Hudgens, Jeffrey W.
Journal of Chemical Physics, 1989 , vol. 91, # 6 p. 3340 - 3359
Kinetics; React. of SiD4 (pressure (0.6-3.0)E-6 Torr) with (29)Si2D(1+) in the cell (25°C) of a mass spectrometer.; React. monitored by MS, elemental composition verified by MS.;
参考文献
Reents Jr.; Mandich
Journal of physical chemistry, 1988 , vol. 92, # 10 p. 2908 - 2912
Kinetics; React. of SiD4 (pressure (0.6-3.0)E-6 Torr) with (29)SiSiD2(1+) in the cell (25°C) of a mass spectrometer.; React. monitored by MS, elemental composition verified by MS.;
参考文献
Reents Jr.; Mandich
Journal of physical chemistry, 1988 , vol. 92, # 10 p. 2908 - 2912
Kinetics; React. of SiD4 (pressure (0.6-3.0)E-6 Torr) with Si2(1+) in the cell (25°C) of a mass spectrometer.; React. monitored by MS, elemental composition verified by MS.;
参考文献
Reents Jr.; Mandich
Journal of physical chemistry, 1988 , vol. 92, # 10 p. 2908 - 2912
Kinetics; React. of SiD4 (pressure (0.6-3.0)E-6 Torr) with Si(1+) (obtained by laser oblation of polycrystalline silicon followed by ionization in the cell (25°C) of a mass spectrometer).; React. monitored by MS, elemental composition verified by MS.;
参考文献
Reents Jr.; Mandich
Journal of physical chemistry, 1988 , vol. 92, # 10 p. 2908 - 2912