Kinetics; byproducts: H2; decompn. of SiH4 in a dc glow discharge, initial pressure range 0.25 - 0.75 torr, dc currents range 10 - 90 mA; kinetics studied by mass spectrometry;
参考文献
Longeway, P.A.; Estes, R.D.; Weakliem, H.A.
Journal of Physical Chemistry, 1984 , vol. 88, # 1 p. 73 - 77
