in neat (no solvent) plasma react. in inductively coupled tubular reactor, temp. of reactor exterior <=180°C, 200 mg of powdered precursor in alumina boat, power of 150-200 W, chamber pressure of 250 mTorr, NF3 flow rate of 10 sccm, reaction time of 10-20 min; X-ray diffraction anal.; EDX anal.; chem. anal.;
参考文献
Delattre; Chupas; Grey; Stacy
Journal of the American Chemical Society, 2001 , vol. 123, # 22 p. 5364 - 5365
