1: 84 percent / 0.05 - 0.2 Torr / 1.) 120 - 130 deg C, 2.) -78 deg C 2: 84 percent / 30percent H2O2 / benzene / 1.) 10 deg C, 15 min; room temp., 15 min 3: 20 percent / 380 - 410 °C / 0.3 - 0.5 Torr View Scheme